Semi Sysco Co., Ltd.

Semi Sysco is a World  Wide Pioneer of CCD based EPD(End Point Detection)system in the FPD and Semiconductor industry and Semi Sysco EPD TM has a lot of Applications Specific Add-On Analytical Features on the EPD function.

Smart EPD TM System can measure/optimize not only the end point of the Semiconductor/FPD processes as Multi-ste
p Etching and Unit Process Etching but also can provide the optimization of the cleaning process at CVD and Etcher.